Mass flow sensors
Applications

* Medical Applications
* Anesthesia electronic
flow meters
* Ventilators
* Peak meters
* Asthma monitor
* Disposable sensors

* Machinery
* Environmental  
instrumentation
* Mass spectrometers
* Intelligent filters
* Consumer electronics
* Ventilation
* Leak detection
FS1015 Series Mass Flow Sensors are specially designed for medical equipment flow monitor
and control applications, and are made with Siargo's world leading proprietary MEMS mass flow
designed channel with a low pressure loss. The current models can be readily applied to ventilators
and anesthesia equipments.  These sensors can also be sterilized in medical liquids for reuse or
hygienic purposes.

FS1015 Series can measure a flow up to 150 SLPM. ISO-15mm connection model is readily
applicable to ventilators and/or anesthesia equipments.


FS4001 Series Mass Flow Sensors are manufactured using Siargo’s proprietary MEMS flow
sensor and package technology. The sensors are specially designed for low flow rate range
applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm.   The maximum flow rate for each model is
manufactured via specially designed package as well as smart electronics so that the optimal
sensitivity would be achieved.   


FS4003/08 Series Mass Flow Sensors are designed for general purpose gas flow
measurements.

FS4003 - can be used for environmental instrumentation such as air samplers, particle counters,
thermal conductive analyzer, concentration analyzers and many others.

FS4008 - can be used for environmental instrumentation such as particle counters, ventilation etc.


FS6022 Series Mass Flow Sensors are manufactured using Siargo's proprietary MEMS flow
sensor and package technology. The sensors are specially designed for the application of medical
equipment such as personal ventilators and CPAP machines for flow monitoring and control with
two flow rate ranges of 0 ~ 250 SLPM and 0 ~ 300 SLPM, respectively.  The compact package
design  enables a large dynamic flow range with a flow resistance less than <0.5 cmH2O/L/sec.
This package withstands a maximum pressure of 0.2 MPa (29 psi) without compromising
performance.


FSG4000 Series Mass Flow Sensors are manufactured with Siargo’s proprietary MEMS mass
flow sensors that have excellent capability for large dynamic range. The series are specially
designed in 3mm and 8 mm pipelines, respectively, for measuring air mass flow in a small package
and can be applied for various industrial applications.
product selection assistance
and questions:
Mass Flow Sensors
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