|Mass flow sensors
|FS1015 Series Mass Flow Sensors are specially designed for medical equipment flow monitor
and control applications, and are made with Siargo's world leading proprietary MEMS mass flow
designed channel with a low pressure loss. The current models can be readily applied to ventilators
and anesthesia equipments. These sensors can also be sterilized in medical liquids for reuse or
FS1015 Series can measure a flow up to 150 SLPM. ISO-15mm connection model is readily
applicable to ventilators and/or anesthesia equipments.
FS4001 Series Mass Flow Sensors are manufactured using Siargo’s proprietary MEMS flow
sensor and package technology. The sensors are specially designed for low flow rate range
applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm. The maximum flow rate for each model is
manufactured via specially designed package as well as smart electronics so that the optimal
sensitivity would be achieved.
FS4003/08 Series Mass Flow Sensors are designed for general purpose gas flow
FS4003 - can be used for environmental instrumentation such as air samplers, particle counters,
thermal conductive analyzer, concentration analyzers and many others.
FS4008 - can be used for environmental instrumentation such as particle counters, ventilation etc.
FS5001 Series Mass Flow Sensors are designed for general purpose flow monitoring and
control applications. The sensors directly measure mass flow in the designed channel with trace
flow detection capability. The lowest flow it can detect is 20 μ L/min. These sensors can readily be
applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen
flush monitoring and control, environmental equipments such as air sampler, analytical
instrumentation such as GC spectrometer.
FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM).
With a full spectrum of customizable adaptors, it can be plug-and-play in many applications.
FS6022 Series Mass Flow Sensors are manufactured using Siargo's proprietary MEMS flow
sensor and package technology. The sensors are specially designed for the application of medical
equipment such as personal ventilators and CPAP machines for flow monitoring and control with
two flow rate ranges of 0 ~ 250 SLPM and 0 ~ 300 SLPM, respectively. The compact package
design enables a large dynamic flow range with a flow resistance less than <0.5 cmH2O/L/sec.
This package withstands a maximum pressure of 0.2 MPa (29 psi) without compromising
FS7002 Series Mass Flow/clog Sensors can be used for open air space flow measurement or
applied for clog sensing in an open space configuration. The sensor can measure air flow up to 10
m/sec with a fast response. The compact design make the installation an easy task. Examples are
clog sensing in LCD projector; HVAC air flow monitoring, air fresher and fan status monitoring.
FS8001 Series Mass Flow Sensors are with the flow range of 0~500 sccm.
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