FS4003/08 Series Mass Flow Sensors
Applications

- Anesthesia equipment
for electronic meters
FS4003/08 series mass flow sensors are designed for general purpose flow monitor and
control applications, and are made with Siargo's world leading proprietary MEMS mass flow
sensors and the smart electronic control system. The sensors directly measure mass flow in
the designed channel with a  low pressure loss. These sensors can readily  be applied for
electronics flow meters for anesthesia equipments, clean room air flow or nitrogen flush
monitor and control, environmental equipments such as air sampler, analytical instrumentation
such as GC spectrometer.
FS4003 has a flow channel diameter of 3 mm. This sensors have a very low pressure loss
while it can measure air flow up to 5 SLPM.   Applications include leakage detection,  particle
counter, and analytical instrumentation.
FS4008 can be configured to measure flow up to 50 SLPM.  It can be applied for gas flow
measurement and/or control equipments.  Applications include electronic flow meter for
anesthesia equipments, clean room gas flow monitor, air sampler, and gas analyzer.

Features and Applications
- Designed for 3 and 8 mm package
- Mass flow detectable from 0 ~ 2 SLPM to 0 ~ 50 SLPM
- Exchangeable connectors for easy installation
- Digital and analog output provide easy access for various communications
- Compact design ready for multiple channel assembly
- Excellent for electronic meters in anesthesia equipment
- Fast response and low power consumption
- Low pressure loss

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Mass Flow Sensors