FS6022 Series Mass Flow Sensors
Applications

- Emergency ventilators
for respiratory and
The Products
The FS6022 mass flow sensors are manufactured using Siargo's proprietary MEMS flow
sensor and package technology. The sensors are specially designed for the application of
medical equipment such as personal ventilators and CPAP machines for flow monitoring and
control with two flow rate ranges of 0 ~ 250 SLPM and 0 ~ 300 SLPM, respectively.  The
<0.5 cmH2O/L/sec. This package withstands a maximum pressure of 0.2 MPa (29 psi)
without compromising performance.
The mechanical interface is the standard ISO-22 mm combined male/female medical
connector that allows the sensor to be readily applied to equipment with a minimal possible
dead space.

Features and Applications
- Mass flow range: 0 ~ 250 SLPM, 0 ~ 300 SLPM
- Fast response time: 8 ms typical
- Highly sensitive in small flow rate
- Low power consumption
- Specially designed for medical equipment
- Sterilizable for reuse

Mechanical Dimensions














Specifications
























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Mass Flow Sensors