Mass flow sensors
Applications

* Environmental
instrumentation
* Mass spectrometers
* Intelligent filters
* Air clogging sensing
* Consumer electronics
* Ventilation
* Leak detection
such as environmental instrumentation (air samplers, particle counters, air monitors etc); mass
spectrometers (GC mass spectrometers); intelligent filters (LCD projectors, air fresher), computer
servers, ventilation, and leak detection, for example.

FS1000 Series are best to be used for ventilators/anesthesia equipments. The sensors can
measure up to 250SLPM. The low flow is down to 0.05SLPM capable ISO-15mm connectors.

FS1015CL  -  ISO-15mm M/F connector, provide either analog and/or digital output with a flow
rate up to 180 SLPM.

FS1022UN/CL - ISO-22mm conical connector, provide either analog and/or digital output with a  
flow rate up to 250 SLPM.

FS4000 Series are designed for general purpose gas flow measurements.

FS4003 - can be used for environmental instrumentation such as air samplers, particle counters,
thermal conductive analyzer, concentration analyzers and many others.

FS4008 - can be used for environmental instrumentation such as particle counters, ventilation etc.

FSG4000 Series mass flow sensors are manufactured with Siargo’s proprietary MEMS mass
flow sensors that have excellent capability for large dynamic range. The series are specially
designed in 3mm and 8 mm pipelines, respectively, for measuring air mass flow in a small package
and can be applied for various industrial applications where monitoring of high speed air mass flow
is required. The design also allows customer to specify the desired mass flow range up to 70m/sec.
Both uni-directional and bi-directional air flow can be measured with directional markers. The
design is compact and easy for installation and manifold assembly.

The FS4001 mass flow sensors are manufactured using Siargo’s proprietary MEMS flow
sensor and package technology. The sensors are specially designed for low flow rate range
applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm.   The maximum flow rate for each model is
manufactured via specially designed package as well as smart electronics so that the optimal
sensitivity would be achieved.   

The FS6022 mass flow sensors are manufactured using Siargo's proprietary MEMS flow
sensor and package technology. The sensors are specially designed for the application of medical
equipment such as personal ventilators and CPAP machines for flow monitoring and control with
two flow rate ranges of 0 ~ 250 SLPM and 0 ~ 300 SLPM, respectively.  The compact package
design  enables a large dynamic flow range with a flow resistance less than <0.5 cmH2O/L/sec.
This package withstands a maximum pressure of 0.2 MPa (29 psi) without compromising
performance.