Mass flow sensors
Applications

* Environmental
instrumentation
* Mass spectrometers
* Intelligent filters
* Air clogging sensing
* Consumer electronics
* Ventilation
* Leak detection
The FS-series MEMS mass flow sensors are designed for general purpose mass flow applications
such as environmental instrumentation (air samplers, particle counters, air monitors etc); mass
spectrometers (GC mass spectrometers); intelligent filters (LCD projectors, air fresher), computer
servers, ventilation, and leak detection, for example.

FS4000 Series are designed for general purpose gas flow measurements.

FS4003 - can be used for environmental instrumentation such as air samplers, particle counters,
thermal conductive analyzer, concentration analyzers and many others.

FS4008 - can be used for environmental instrumentation such as particle counters, ventilation etc.

FS5000 Series are applicable for mass spectrometers such as GC mass spectrometers, trace gas
detection and leak detection, for example.

FS7000 Series are designed for intelligent air filters in a LCD projector, air fresher clogging
detection, ventilation, computer server air profiler, and others.