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Flow Sensors, Meters & Mass Flow Controllers
TTOF Microfluidic Sensors and Liquid Flow
Pressure Sensors and Concentration Sensors

Mass flow sensing products: mass flow meters





MF3000





The MF3000 series mass flow meters are designed for general-purpose gas metering, processing, monitoring, and/or control. The products feature enhanced flow conditioning, enabling greater flexibility during installation. It can be applied to pneumatic control, process automation, and other industrial applications, offering a low pressure drop for enhanced energy efficiency. The products are designed for easy replacement of mechanical connectors. The standard connectors for 2 to 200 SLPM models are BSPT 1/4”-male or One-touch connectors. For models 500 to 1500, the standard connector is BSPT 1/2”-female, and other customized connectors are available.


Datasheet

MF4000





The MF4000 series mass flow meters are designed for general-purpose, precise monitoring and control of industrial gases. It can also be applied to medical equipment such as anesthesia devices, endoscopes, and plasma cancer treatment systems. Industrial applications include welding machines, laser equipment, and gas mixtures, among others. The series offers an extended dynamic flow range, with a working pressure rating of up to 0.8 MPa (8 bar or 112 psi), and a compensated temperature range of -10 to +55°C. The products are designed for easy replacement of mechanical connectors. The standard connectors are one-touch or BSPT 1/4”, and other customized ones are available upon request.


Datasheet

MF4700





The MF/FS4700 series mass flow meters use Siargo’s proprietary MEMS calorimetric mass flow sensing technology and smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials and coated with a water/oilproof nano-coating for enhanced performance and reliability. The meter body is made of either aluminum alloy or stainless steel, compatible with most gas applications. The MF4700 is designed for general-purpose, precise monitoring and control of industrial gas processing. The meter series has a full-scale down to 10 sccm, offers an extended dynamic flow range with a working pressure rating of up to 1.0 MPa, and a temperature range of -10°C to +55°C.


Datasheet

MF5000





The MF5000 series mass flow meters are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS mass flow sensing technology and innovative electronic circuitry. The meters directly measure mass flow with a very low-pressure loss. It offers an expanded range of pipe diameters, ranges, and gas types, among others. The current models can be readily applied to industrial gas processes and control, as well as other applications in laboratories and test benches for hazardous zones of Ex ia IIC T4 Gb. MF5000 can measure a flow from 0.15 up to 800 SLPM. The connectors can be fully customized.


Datasheet

MF5100





The MF5100 series mass flow meters are designed for an extensive dynamic range (200:1) and high accuracy of 1.5% reading in flow metering and control applications. With Siargo's proprietary MEMS mass flow sensing technology, the meter can automatically recognize registered gases and operate on a lithium-ion battery for up to 5 years. The current models can readily be applied to applications involving multiple gas process control and flow-efficiency calibration, as well as those requiring mobile power. MF5100 can measure a flow up to 100 SLPM. The connectors can be fully customized.


Datasheet

MF5200





The MF5200 series mass flow meters are designed using the Company’s proprietary Thermal-D MEMS thermal sensing technology, which combines calorimetry and diffusivity sensing. Various wireless data options make the products ready for plug-and-play IoT applications. Typical applications include hospital gases (such as air, oxygen, nitrogen, carbon dioxide, argon, and nitrous oxide), industrial processing gas monitoring and management, as well as other applications. The design is excellent for applications where the display must be placed separately from the meter body. In addition to gas mass flow, the products can also offer gas pressure and gas temperature measurements.


Datasheet

MF5600





The MF5600 series mass flow meters are designed for general-purpose flow metering and control applications that require a detachable meter head for distance data reading. The meters directly measure mass flow with minimal pressure loss. The current models can be readily applied to hospital oxygen delivery management, industrial process monitoring, and gauging, as well as other applications such as welding gas equipment and food and beverage processes. MF5600 can measure a flow up to 800 SLPM. The connectors can be fully customized.


Datasheet

MF5700





The MF5700 series mass flow meters are designed for general-purpose flow metering and control applications that utilize IoT or wired data, while offering a battery-powered option. With Siargo's proprietary MEMS mass flow sensing technology and smart electronic circuitry, the products provide unprecedented cost-effectiveness, minimal pressure loss, and a range of gas options. The current models can also be readily applied to many portable applications. MF5700 can measure a flow up to 500 SLPM. The mechanical connectors can be fully customized.


Datasheet

MF5900





The MF5900 series mass flow meters are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS Thermal-D sensing technology and innovative electronic circuitry. The meters will measure mass flow while maintaining very high sensitivity at low flow rates, enabling selective measurement of gases without requiring gas-transfer data. The current models enable users to program various functions and are readily applicable to low-flow natural gas and process metering. MF5900 can measure a flow up to 5000 SLPM with a 2” pipe. The connectors can be customized.


Datasheet
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