The MFC2000 series gas mass flow controllers are designed for general-purpose non-corrosive gas flow control applications, with a full-scale mass flow rate from 50 mLn/min to 200 Ln/min. Both analog and RS485 Modbus interfaces are available. Other standard communication options, such as DeviceNet, ProfiNet, EtherNet, EtherCat, and IO-Link, are available upon request from the manufacturer and will become standard offerings in due course. These interfaces can also be further customized upon request.

The MFC4000 series gas mass flow controllers are designed for non-corrosive gas flow control applications with a full-scale mass flow rate ranging from 50 mLn/min to 1000 mLn/min. Both analog and RS485 Modbus interfaces are available. The MFC4000 is specifically designed for instrumentation or portable device applications, featuring a tiny form factor. Other standard communication options can be customized upon request.

The MFC5100M series of gas mass flow controllers is designed for non-corrosive gas flow control applications, with a full-scale mass flow rate of up to 100 Ln/min. The product features a touchscreen that allows users to perform the basic functions. RS485 Modbus interface is also offered. Other standard communication options, such as DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link, etc., are available by contacting the manufacturer and will become standard offers in due course. These interfaces can also be further customized upon request.

The MFC5000 series gas mass flow controllers are made in compliance with SEMI standards for the relevant applications. The product offers a wide range of bus communication options, including DeviceNet, ProfiNet, EtherCat, and IO-Link. These interfaces can also be further customized upon request. The MFC5000 is designed for process control, featuring a 100:1 dynamic range. It controls pressure in the range of 0.1 to 1 MPa （15 to 150 PSI） and a compensated temperature range of 0 to 50°C. The device can also work under vacuum conditions.

The MFC1100 series gas mass flow controllers are designed for high-volume gas flow control applications, featuring a full-scale range of 20 to 50 Ln/min. Both analog （0~5 Vdc or 4~20 mA） and an RS485 Modbus interface for mass flow control with the proportional valve. The MFC1100 can be applied for non-corrosive process gas control with a 100:1 dynamic range. It controls within a pressure range of 0.1 to 0.8 MPa （15 to 117 PSI） and a compensated temperature range of 0 to 55 °C. Typical applications include digital delivery of anesthesia and welding gases.

The MFC1600 series gas mass flow controllers are designed for non-corrosive gas flow control applications, with a full-scale mass flow rate from 50 mL/min to 20 mL/min. Both analog and RS485 Modbus interfaces are available for the control schedules. MFC1600 features a cost-effective aluminum alloy package, operates in a pressure range of 0.1 to 0.8 MPa (15 to 120 PSI), and has a compensated temperature range of 0 to 50°C. Typical applications include thin-film deposition and medical equipment.